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BL55
High-speed response, superior accuracy, and high environmental resistance
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BS75A-R/RS
High accuracy laser scales with a low expansion coefficient that provide reliable, high-precision measuring with a resolution selectable from 0.0086 µm and 0.1 µm (BD60)
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BS75A/76
The BS75A and BS76 Series are high-accuracy laser scales with a low expansion coefficient that provides reliable, hith-precision measuring with a resolution selectable from 0.01µm, 0.05µm and 0.1µm.
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BS77
Compact for easy installation and high accuracy.Well suited for use with instruments which require high accuracy measurements such as electron microscopes and wafer inspection devices.
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BS78
Compact LASERSCALE with a zero point boosting a resolution of 0.14nm Capable of high accuracy and high speed measuring supporting the next generation semiconductor design rule.
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SA57
Absolute type scale for feedback applications
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SH10A
Small feedback scale
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SH11
High accuracy feedback scale
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SH12
Analog output scale for feedback applications
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SH50
Rigid scale for feedback applications
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SH52
Analog output scale for feedback applications
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